Ion Gun Model 1402
Low Energy Ion Gun
Ion Gun Model 1402W
Low Energy Ion Gun with Integrated Wien Filter

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Focusing column optimized for low energy throughput
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High brightness electron impact source for maximum bulk material removal
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Emission regulated bombardment provides stable ion current with front panel adjustable dynamic range x300
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Continuously variable beam energy up to 5keV
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Replaceable beam trimming aperture with typical life-time of > 500 hours
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Dual filaments provide operational backup with typical filament life-time > 500 hours
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All UHV compatible and etch resistant materials used in fabrication
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Operates over the range of inert gas species, Oxygen with optional Thoria filament
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3 Degree Bend in Column for Neutral Suppression
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2 Stage Differential Pumping for Operation with very low Chamber Pressure